In this article nickel interdigital capacitors were fabricated on top of silicon substrates.The capacitance of the interdigital capacitor was optimized by le maudit vape institut coating the electrodes with a 60 nm layer of HfO2.An analytical solution of the capacitance was compared to electromagnetic simulations using COMSOL and with experimental measurements.
Results show that modeling ovs-02gt interdigital capacitors using Finite Element Method software such as COMSOL is effective in the design and electrical characterization of these transducers.